KMPR 1000
Chemically Amplified Epoxy-based Negative Photoresist capable of 4-25um in a single-spin @ 3000rpm Applications:MEMSDRIE etch maskPlatingMaterial Attributes: i-line processingDeveloped in TMAH (0.26N)high aspect ratio with vertical sidewallsHigh chemical and plasma resistanceGood adhesion to metalsVisit the AGas (A-Gas) Electronic Materials website for more information on KMPR 1000