Low Stress Adhesive for MEMS Packaging:

Adhesive Key Features:

Adhesive range developed for MEMS PackagingLow-stress die attach adhesiveHighly flexible stress relieving epoxy High bond strengthShort processing timesSuitable for other low-stress adhesive applications

MicroElectroMechanical Systems (MEMS) are found in a very wide variety of applications, from smart phones to military gyroscopes. These are usually measuring minute relative changes in the surrounding environment, so the adhesive used to bond the MEMS device to the substrate must be highly stress-relieving, in order that the adhesive itself doesn't induce stress into the MEMS device. DELO has developed a range of highly flexible adhesives that also offers high bond strength, a very unusual combination that has in the past proved extremely difficult to master.

A typical MEMS device consists of a MEMS IC + ASIC IC, both adhesive-bonded onto the substrate. The ASIC is then encapsulated, before the complete assembly is covered with a lid. These four separate applications require very different types of adhesives:

MEMS IC Adhesive

This is the most critical application, because the MEMS die must be as insulated as possible from the substrate to which it is bonded. The adhesive needs to have a high flexibility (Young's Modulus ~ 5 MPa), high shear strength, and short processing time, for example curing at 100°C for 15 minutes, as most MEMS devices are manufactured in very high volumes.

ASIC IC Adhesive

Typical die attach adhesives are used for this, such as can be found here on the Die Attach Adhesives page. The adhesive should ideally be fast curing at low temperatures.

ASIC Encapsulation Adhesive

Typically this too will be a highly flexible adhesive. It should also be jettable, and have a fast processing time, for example, curing in 15 minutes at 100°C.

Lid Adhesive

This adhesive needs to have a very high impact resistance to protect the sensitive components in the MEMS package. As most lids are metal, the adhesive needs to bond well to gold, nickel, and stainless steel. It should also have a high electrical conductivity due to its EMC shielding requirement. DELO DUALBOND IC343 is a typical example of this type of adhesive.

More detailed information on DELO's range of die attach adhesives can be found here.

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MEMS Packaging Adhesives Technical Downloads

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DELO MEMS Packaging Brochure

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DELO DUALBOND IC343 Technical Data Sheet

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DELO Bonding in Electronics Brochure

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