Turn Table Plasma Etching & Cleaning System: TT-1

TT-1 Key Features

Rotating active plasma processing for even treatment425mm diameter rotating turntableInsulated or direct-on method of plasma treatment600W 13.56MHz Power Supply with Automatic Matching Network PLC-based Touch Screen Control Interface

The TT-1 is a Surface Modification System having a rotating electrode designed to meet the needs of the wire bonding industry having the capacity to evenly process multiple slotted lead frame magazines.

The Turn Table (TT) model is based on Plasma Etch Inc.'s BT-1 Platform, sharing the same robust and reliable features whilst providing enhanced surface modification capabilities, these include rotating active processing and a generously sized circular chamber, which has the option of insulated, or direct on electrode method of treatment.

Loading & processing proves is quick and effective, keeping production rates high, easily meeting demands of even the heaviest process requirements. The vacuum chamber contains two levels of electrodes, measuring up to 600mm / 24? in diameter. The operator simply places product onto electrodes and the systems turntables rotate at a constant speed during the plasma cleaning cycle.

TT standard features include:

Single Level 430mm Dia. Rotating ElectrodeElectrode Jog & Speed ControlR.F. Generator & Matching Network 600 WattsMass Flow Controller, 2 Channels 0-500 CC/MinVacuum Gauge 0-10 TorrMicroprocessor System Touch Screen ControlMultiple Sequence StorageVacuum Pump/Booster Blower, O2 ServiceDual Process SequenceOil Filtration, Vacuum Pump 3 MicronsOil Mist EliminatorFootprint, Plasma Console 790x760x1780mmFootprint, Vacuum Pump 400x760x430mm

Optional System Features:

RF Generator 1250 WattsAutomatic N2 Purging, Vacuum PumpLow Gas Alarms Up to 4 ChannelsComputer Control System w/ Touch ScreeningData Reporting, Event Viewing, PrinterSignal Light TowerDry Vacuum Pump 79/355 CFMThrottle Vacuum ControllerMass Flow Controllers Up to 4 ChannelsControlled Rate N2 Chamber PurgingOil Mist EliminatorCustom Chambers and Electrodes

Please contact us for the full range of options.

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TT-1 Technical Downloads

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Plasma Etch Turntable Cleaner-Etcher

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