PRISM optical evaporators

The PRISM range of optical evaporators is available in 3 chamber sizes (900, 1200 & 1500mm substrate fixture), with the following standard equipment:

PLC & PC/HMI Control System
Choice of either diffusion, cryo or turbo pumping systems
Quartz crystal rate & thickness control
Up to 3 single or multi hearth Temescal e-beam sources

Multi boat resistance heated sources
High energy advanced ion beam source
Combination Pirani/Bayard-Alpert hot ion gauge
2 channel mass flow controller for reactive gas admission
Quartz lamp radiant substrate heating
Rotary substrate holder with customised work holders