SPECTRUM optical sputter systems

The SPECTRUM range of optical sputter systems is available in either a rotary layout (Spectrum-R), or a linear system (Spectrum-L) with the following standard equipment:

Industrial PC control
High quantity turbo pumps with PFPE backing pump
Deposition rate monitor & controller
2 high uniformity/usage dual magnetrons

2 channel mass flow controller for reactive gas admission
Combination Pirani/Bayard-Alpert hot ion gauge
Nitrogen purge & vent
Rotary/Linear substrate translation