Substrate heating & monitoring systems

Like the V2000 series production sputtering tools, the E2000 production evaporator is designed specifically for the end user's requirements.

Recent designs have included:

Single or multi-hearth e-beam guns (single up to 200cc capacity)
Multi-boat thermal evaporation set up
Substrate heating & monitoring systems (up to 650°C)

Substrate fixturing systems to include planetary motion, rotary motion & linear motion
Deposition rate monitors & control systems
Ion assisted deposition and substrate cleaning
Reactive gas admission for oxide/nitride production
Turbopump & Polycold for fast pumpdown