OmniGIS Gas Injector System

This innovative device supports 3 on-board gas sources and 2 additional external purge/carriers and yet only occupies a single GIS port. Featuring a recipe mode for the mixing of gases, a gas delivery valve that can deliver gas over a range of duty cycles, and a digital needle location control. This optimal gas delivery system enables high resolution nanopatterning and sophisticated processes, such as atomic layer deposition. Finally, the OmniGIS employs user replaceable crucibles that enable source changes in less than 20 minutes with no realignment of the injector system. This enables one OmniGIS to support more than 3 sources and to have rotating “on the shelf” source readiness.